Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles. - Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho (Crystals (2073-4352), 2026)