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Optical Characterization of Silicon Nitride-based Bilayer Thin Films Using Spectroscopic Ellipsometry and the Maxwell-Garnett Model.

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Bibliographic Details
Title: Optical Characterization of Silicon Nitride-based Bilayer Thin Films Using Spectroscopic Ellipsometry and the Maxwell-Garnett Model.
Authors: Beddiaf, Abdelaziz1,2, beddiafaziz@univ-khenchela.dz, Medjaldi, Malika1, malika.medjaldi@univ-khenchela.dz, Djamai, Djemouai3, djamai_djmouai@univ-khenchela.dz, Lanani, Abderrahim1, lanani_arahim@univ-khenchela.dz
Source: Electronics & Electrical Engineering; 2025, Vol. 31 Issue 5, p35-40, 6p
Database: Applied Science & Technology Source
Description
ISSN:13921215
DOI:10.5755/j02.eie.39263