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Effect of Piezoelectric Layer on Resonant Frequency of Silicon MEMS Membranes.

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Bibliographic Details
Title: Effect of Piezoelectric Layer on Resonant Frequency of Silicon MEMS Membranes.
Authors: Gusev, E. Yu.1, eyugusev@sfedu.ru, Petrova, S. V.1, Jiang, L.2, Klimin, V. S.1, Polyakov, V. V.1, Han, L.2,3, Wang, S.2, Wang, Z.2, Zhang, W.3, Ageev, O. A.1
Source: Russian Microelectronics; Dec2025, Vol. 54 Issue 8, p1142-1146, 5p
Database: Applied Science & Technology Source
Description
ISSN:10637397
DOI:10.1134/S1063739725601833