Effects of Si Target Power on the Mechanical Properties and Antioxidation and Antiablation Properties of Magnetron-Sputtered (WMoTaNb)SiN Refractory High-Entropy Nitride Films.
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| Title: | Effects of Si Target Power on the Mechanical Properties and Antioxidation and Antiablation Properties of Magnetron-Sputtered (WMoTaNb)SiN Refractory High-Entropy Nitride Films. |
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| Authors: | Wu, Xiangyu1, Wu, Shangkun1, Shao, Wenting1, Chen, Jian1, Yang, Wei1 |
| Source: | Coatings (2079-6412); Mar2026, Vol. 16 Issue 3, p309, 22p |
| Database: | Applied Science & Technology Source |
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