Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance.
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| Title: | Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance. |
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| Authors: | Yin, H. N.1, yhn23@stu.just.edu.cn, Cai, L. H.1,2, Yao, J.3, Fang, H. F.1,2 |
| Source: | Journal of Applied Fluid Mechanics; May2026, Vol. 19 Issue 5, p1188-1204, 17p |
| Database: | Applied Science & Technology Source |
| ISSN: | 17353572 |
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| DOI: | 10.47176/jafm.19.5.3997 |
