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Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance.

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Title: Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance.
Authors: Yin, H. N.1, yhn23@stu.just.edu.cn, Cai, L. H.1,2, Yao, J.3, Fang, H. F.1,2
Source: Journal of Applied Fluid Mechanics; May2026, Vol. 19 Issue 5, p1188-1204, 17p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
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PubType: Academic Journal
PubTypeId: academicJournal
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      – Type: doi
        Value: 10.47176/jafm.19.5.3997
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      – Code: eng
        Text: English
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        PageCount: 17
        StartPage: 1188
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      – TitleFull: Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance.
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            NameFull: Yao, J.
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              Text: May2026
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              Y: 2026
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              Value: 19
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              Value: 5
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