UV ozone oxidized high-k TaOx dielectric with van der Waals interface for two-dimensional electronic devices.
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| Title: | UV ozone oxidized high-k TaOx dielectric with van der Waals interface for two-dimensional electronic devices. |
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| Authors: | Tong, Tong1, Gao, Yuan2, Long, Yinfeng3, Liao, Kan2, Chen, Han3, Lin, Long2, Lan, Xiang2, Zhang, Linghai4, Wang, Lin3, hhpof@hotmail.com, Jiang, Yucheng1, hhpof@hotmail.com, Li, Weisheng2, hhpof@hotmail.com |
| Source: | Applied Physics Letters; 4/13/2026, Vol. 128 Issue 15, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0321761 |
