Atomic force microscopy (AFM) tip metrology and inspection by knife edge diffractometry.
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| Title: | Atomic force microscopy (AFM) tip metrology and inspection by knife edge diffractometry. |
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| Authors: | Lu, Kuan1, Lin, Pengfei1, Cho, Hyeonho2, Kim, Sunghan2, Park, Jiyong3,4, Lee, ChaBum1, cblee@tamu.edu |
| Source: | Review of Scientific Instruments; Apr2026, Vol. 97 Issue 4, p1-10, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0309841 |
