Electromigration Reliability and Failure Mechanisms in Novel 3D Cu Stagger-via Interconnects for Advanced High-Density Fan-Out Packaging.

Saved in:
Bibliographic Details
Title: Electromigration Reliability and Failure Mechanisms in Novel 3D Cu Stagger-via Interconnects for Advanced High-Density Fan-Out Packaging.
Authors: Shao, Kuan-Ju1, Chiu, Meng-Chun2, Hu, Jui-Yi2, Liang, Chien-Lung2, clliang@mail.ntust.edu.tw, Tsai, Min-Yan3, Lin, Yung-Sheng3, Wang, Chen-Chao3, Hung, Chih-Pin3, Lin, Kwang-Lung1, matkllin@mail.ncku.edu.tw
Source: JOM: The Journal of The Minerals, Metals & Materials Society (TMS); Jun2026, Vol. 78 Issue 6, p5188-5206, 19p
Database: Applied Science & Technology Source
Description
ISSN:10474838
DOI:10.1007/s11837-025-08069-5