Fabrication of Low-Resistance Ru Films by Sputtering in Ar or Kr and Gas Backscattering Behavior.
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| Title: | Fabrication of Low-Resistance Ru Films by Sputtering in Ar or Kr and Gas Backscattering Behavior. |
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| Authors: | Yokoyama, Yamato1, Kawamura, Midori1, kawamumd@mail.kitami-it.ac.jp, Kiba, Takayuki1 |
| Source: | Journal of Electronic Materials; Jun2026, Vol. 55 Issue 6, p4926-4931, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-026-12846-6 |
