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Fabrication of Low-Resistance Ru Films by Sputtering in Ar or Kr and Gas Backscattering Behavior.

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Title: Fabrication of Low-Resistance Ru Films by Sputtering in Ar or Kr and Gas Backscattering Behavior.
Authors: Yokoyama, Yamato1, Kawamura, Midori1, kawamumd@mail.kitami-it.ac.jp, Kiba, Takayuki1
Source: Journal of Electronic Materials; Jun2026, Vol. 55 Issue 6, p4926-4931, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 193685044
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Fabrication of Low-Resistance Ru Films by Sputtering in Ar or Kr and Gas Backscattering Behavior.
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  Data: <searchLink fieldCode="AU" term="%22Yokoyama%2C+Yamato%22">Yokoyama, Yamato</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Kawamura%2C+Midori%22">Kawamura, Midori</searchLink><relatesTo>1</relatesTo>, <i>kawamumd@mail.kitami-it.ac.jp</i><br /><searchLink fieldCode="AU" term="%22Kiba%2C+Takayuki%22">Kiba, Takayuki</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electronic+Materials%22">Journal of Electronic Materials</searchLink>; Jun2026, Vol. 55 Issue 6, p4926-4931, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=193685044
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s11664-026-12846-6
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 4926
    Titles:
      – TitleFull: Fabrication of Low-Resistance Ru Films by Sputtering in Ar or Kr and Gas Backscattering Behavior.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Yokoyama, Yamato
      – PersonEntity:
          Name:
            NameFull: Kawamura, Midori
      – PersonEntity:
          Name:
            NameFull: Kiba, Takayuki
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      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: Jun2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 03615235
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              Value: 55
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: Journal of Electronic Materials
              Type: main
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