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基于X射线光电子能谱溅射法的多层薄膜材料研究.

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Bibliographic Details
Title: 基于X射线光电子能谱溅射法的多层薄膜材料研究. (Chinese)
Authors: 杨, 森1, yangsen951210@163.com, 段, 建霞2, 杨, 立平2, 王, 雅君1, wangyajun@cup.edu.cn, 姚, 文清2, yaowq@mail.tsinghua.edu.cn
Source: Chinese Journal of Inorganic Analytical Chemistry / Zhongguo Wuji Fenxi Huaxue; Jun2026, Vol. 16 Issue 6, p1072-1086, 15p
Database: Applied Science & Technology Source
Description
ISSN:20951035
DOI:10.20236/j.CJIAC.2026.06.011