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Study on the imaging of bright-field and dark-field for contact holes in extreme ultraviolet lithography considering stage vibration effects.

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Bibliographic Details
Title: Study on the imaging of bright-field and dark-field for contact holes in extreme ultraviolet lithography considering stage vibration effects.
Authors: Shen, Hao1,2,3, Zhang, Libin1,2,3, zhanglibin@ime.ac.cn, Wang, Jiashuo1,2,3, Rui, Dinghai1,2,3, Su, Yajuan1,2,3, Wei, Yayi1,2,3, zhanglibin@ime.ac.cn
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-10, 10p
Database: Applied Science & Technology Source
Description
ISSN:21662746
DOI:10.1116/6.0005261