Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening. - Wen, Chi-Jen; Lin, Tee; Ali Zargar, Omid; Hsieh, Chi-Huan; Hu, Shih-Cheng; Shih, Yang-Cheng; Leggett, Graham (IEEE Transactions on Semiconductor Manufacturing, 2026)