Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy.
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| Title: | Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy. |
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| Authors: | Yoshimoto, Shigeru1,2, Ito, Kenji1, k-ito@aist.go.jp |
| Source: | Review of Scientific Instruments; May2026, Vol. 97 Issue 5, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0294598 |
