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Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy.

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Title: Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy.
Authors: Yoshimoto, Shigeru1,2, Ito, Kenji1, k-ito@aist.go.jp
Source: Review of Scientific Instruments; May2026, Vol. 97 Issue 5, p1-7, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 194178148
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy.
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  Data: <searchLink fieldCode="AU" term="%22Yoshimoto%2C+Shigeru%22">Yoshimoto, Shigeru</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Ito%2C+Kenji%22">Ito, Kenji</searchLink><relatesTo>1</relatesTo>, <i>k-ito@aist.go.jp</i>
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  Data: <searchLink fieldCode="JN" term="%22Review+of+Scientific+Instruments%22">Review of Scientific Instruments</searchLink>; May2026, Vol. 97 Issue 5, p1-7, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=194178148
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/5.0294598
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 7
        StartPage: 1
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      – TitleFull: Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy.
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            NameFull: Yoshimoto, Shigeru
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            NameFull: Ito, Kenji
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          Dates:
            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
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              Value: 97
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              Value: 5
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            – TitleFull: Review of Scientific Instruments
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