Submicron‐Order Film Thickness Measurement of Nonmagnetic Metal Thin Films Formed on Ferromagnetic Metal Substrates.
Saved in:
| Title: | Submicron‐Order Film Thickness Measurement of Nonmagnetic Metal Thin Films Formed on Ferromagnetic Metal Substrates. |
|---|---|
| Authors: | Matsuura, Fumiaki1,2, matsuuraf@sst.shinkawa.co.jp, Enoki, Shigemi2, Sato, Mitsuhide1, Mizuno, Tsutomu1 |
| Source: | Electronics & Communications in Japan; Jun2026, Vol. 109 Issue 2, p3-13, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 19429533 |
|---|---|
| DOI: | 10.1002/ecj.70025 |
