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Film and surface stress during Al2O3 thermal atomic layer etching using in situ wafer curvature measurements.

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Bibliographic Details
Title: Film and surface stress during Al2O3 thermal atomic layer etching using in situ wafer curvature measurements.
Authors: Vanfleet, Ryan B.1, Bright, Victor M.2, George, Steven M.1, Steven.George@Colorado.edu
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; May2026, Vol. 44 Issue 3, p1-9, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 194305131
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Label: Title
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  Data: Film and surface stress during Al2O3 thermal atomic layer etching using in situ wafer curvature measurements.
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  Data: <searchLink fieldCode="AU" term="%22Vanfleet%2C+Ryan+B%2E%22">Vanfleet, Ryan B.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Bright%2C+Victor+M%2E%22">Bright, Victor M.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22George%2C+Steven+M%2E%22">George, Steven M.</searchLink><relatesTo>1</relatesTo>, <i>Steven.George@Colorado.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+A-Vacuums%2C+Surfaces+%26+Films%22">Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films</searchLink>; May2026, Vol. 44 Issue 3, p1-9, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=194305131
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/6.0005425
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 1
    Titles:
      – TitleFull: Film and surface stress during Al2O3 thermal atomic layer etching using in situ wafer curvature measurements.
        Type: main
  BibRelationships:
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      – PersonEntity:
          Name:
            NameFull: Vanfleet, Ryan B.
      – PersonEntity:
          Name:
            NameFull: Bright, Victor M.
      – PersonEntity:
          Name:
            NameFull: George, Steven M.
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          Dates:
            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 07342101
          Numbering:
            – Type: volume
              Value: 44
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
              Type: main
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