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Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density.

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Title: Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density.
Authors: Li, Zefei1, Feng, Yiwen1,2, yiwenfeng@dlut.edu.cn, Wang, Fengshu1, Zhang, Xiaopeng3, Zhang, Ran1, Chen, Xu1, Liu, Chang1, Li, Yikang1, Chen, Xiangji1, Kong, Lingjie4, Liang, Shiwen4, Wang, Dazhi1,2,4, d.wang@dlut.edu.cn
Source: Advanced Materials Technologies; Jun2026, Vol. 11 Issue 11, p1-12, 12p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 194362302
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density.
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  Data: <searchLink fieldCode="JN" term="%22Advanced+Materials+Technologies%22">Advanced Materials Technologies</searchLink>; Jun2026, Vol. 11 Issue 11, p1-12, 12p
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        Value: 10.1002/admt.202502069
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              Text: Jun2026
              Type: published
              Y: 2026
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