Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density. - Li, Zefei; Feng, Yiwen; Wang, Fengshu; Zhang, Xiaopeng; Zhang, Ran; Chen, Xu; Liu, Chang; Li, Yikang; Chen, Xiangji; Kong, Lingjie; Liang, Shiwen; Wang, Dazhi (Advanced Materials Technologies, 2026)