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Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density.

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Bibliographic Details
Title: Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density.
Authors: Li, Zefei1, Feng, Yiwen1,2, yiwenfeng@dlut.edu.cn, Wang, Fengshu1, Zhang, Xiaopeng3, Zhang, Ran1, Chen, Xu1, Liu, Chang1, Li, Yikang1, Chen, Xiangji1, Kong, Lingjie4, Liang, Shiwen4, Wang, Dazhi1,2,4, d.wang@dlut.edu.cn
Source: Advanced Materials Technologies; Jun2026, Vol. 11 Issue 11, p1-12, 12p
Database: Applied Science & Technology Source
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