View in EDS

High-Power Impulse Magnetron Sputter Deposition of Ultrathick Amorphous Carbon.

Saved in:
Bibliographic Details
Title: High-Power Impulse Magnetron Sputter Deposition of Ultrathick Amorphous Carbon.
Authors: Engwall-Holmes, A. M.1, engwall1@llnl.gov, Bayu Aji, L. B.1, Shin, S. J.1, Merlo, J. B.1, Bae, J. H.2, Kucheyev, S. O.1
Source: Fusion Science & Technology; Jul2026, Vol. 82 Issue 5, p947-955, 9p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 194610965
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: High-Power Impulse Magnetron Sputter Deposition of Ultrathick Amorphous Carbon.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Engwall-Holmes%2C+A%2E+M%2E%22">Engwall-Holmes, A. M.</searchLink><relatesTo>1</relatesTo>, <i>engwall1@llnl.gov</i><br /><searchLink fieldCode="AU" term="%22Bayu+Aji%2C+L%2E+B%2E%22">Bayu Aji, L. B.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Shin%2C+S%2E+J%2E%22">Shin, S. J.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Merlo%2C+J%2E+B%2E%22">Merlo, J. B.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Bae%2C+J%2E+H%2E%22">Bae, J. H.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Kucheyev%2C+S%2E+O%2E%22">Kucheyev, S. O.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Fusion+Science+%26+Technology%22">Fusion Science & Technology</searchLink>; Jul2026, Vol. 82 Issue 5, p947-955, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=194610965
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1080/15361055.2025.2502890
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 947
    Titles:
      – TitleFull: High-Power Impulse Magnetron Sputter Deposition of Ultrathick Amorphous Carbon.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Engwall-Holmes, A. M.
      – PersonEntity:
          Name:
            NameFull: Bayu Aji, L. B.
      – PersonEntity:
          Name:
            NameFull: Shin, S. J.
      – PersonEntity:
          Name:
            NameFull: Merlo, J. B.
      – PersonEntity:
          Name:
            NameFull: Bae, J. H.
      – PersonEntity:
          Name:
            NameFull: Kucheyev, S. O.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: Jul2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 15361055
          Numbering:
            – Type: volume
              Value: 82
            – Type: issue
              Value: 5
          Titles:
            – TitleFull: Fusion Science & Technology
              Type: main
ResultId 1