APA (7th ed.) Citation

Fischeneder, M., Schneider, M., & Schmid, U. (2026). Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum. Journal of Sensors & Sensor Systems, 15(1), 53. https://doi.org/10.5194/jsss-15-53-2026

Chicago Style (17th ed.) Citation

Fischeneder, Martin, Michael Schneider, and Ulrich Schmid. "Active Q Factor Control of MEMS Cantilevers by Integrated Piezoelectric Transducers for High-speed AFM Applications Under Vacuum." Journal of Sensors & Sensor Systems 15, no. 1 (2026): 53. https://doi.org/10.5194/jsss-15-53-2026.

MLA (9th ed.) Citation

Fischeneder, Martin, et al. "Active Q Factor Control of MEMS Cantilevers by Integrated Piezoelectric Transducers for High-speed AFM Applications Under Vacuum." Journal of Sensors & Sensor Systems, vol. 15, no. 1, 2026, p. 53, https://doi.org/10.5194/jsss-15-53-2026.