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Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.

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Title: Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.
Authors: Fischeneder, Martin1, martin@fischeneder.at, Schneider, Michael1, Schmid, Ulrich1
Source: Journal of Sensors & Sensor Systems; 2026, Vol. 15 Issue 1, p53-65, 13p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 195626496
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.
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  Data: <searchLink fieldCode="AU" term="%22Fischeneder%2C+Martin%22">Fischeneder, Martin</searchLink><relatesTo>1</relatesTo>, <i>martin@fischeneder.at</i><br /><searchLink fieldCode="AU" term="%22Schneider%2C+Michael%22">Schneider, Michael</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Schmid%2C+Ulrich%22">Schmid, Ulrich</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Sensors+%26+Sensor+Systems%22">Journal of Sensors & Sensor Systems</searchLink>; 2026, Vol. 15 Issue 1, p53-65, 13p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=195626496
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      – Type: doi
        Value: 10.5194/jsss-15-53-2026
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 53
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      – TitleFull: Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.
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            NameFull: Fischeneder, Martin
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            NameFull: Schneider, Michael
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              Text: 2026
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