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Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.

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Bibliographic Details
Title: Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.
Authors: Fischeneder, Martin1, martin@fischeneder.at, Schneider, Michael1, Schmid, Ulrich1
Source: Journal of Sensors & Sensor Systems; 2026, Vol. 15 Issue 1, p53-65, 13p
Database: Applied Science & Technology Source
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Description
ISSN:21948771
DOI:10.5194/jsss-15-53-2026