Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum.
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| Title: | Active Q factor control of MEMS cantilevers by integrated piezoelectric transducers for high-speed AFM applications under vacuum. |
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| Authors: | Fischeneder, Martin1, martin@fischeneder.at, Schneider, Michael1, Schmid, Ulrich1 |
| Source: | Journal of Sensors & Sensor Systems; 2026, Vol. 15 Issue 1, p53-65, 13p |
| Database: | Applied Science & Technology Source |
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