Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
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| Title: | Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater |
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| Authors: | Sittinger, V., sittinger@ist.fraunhofer.de, Pflug, A.1, Werner, W.1, Rickers, C.1, Vergöhl, M.1, Kaiser, A.1, Szyszka, B.1 |
| Source: | Thin Solid Films; Apr2006, Vol. 502 Issue 1/2, p175-180, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00406090 |
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| DOI: | 10.1016/j.tsf.2005.07.270 |
