APA (7th ed.) Citation

Liang, E., Hung, S., Hsieh, Y., & Lin, C. (2008). Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 26(1), 110. https://doi.org/10.1116/1.2825163

Chicago Style (17th ed.) Citation

Liang, Eih-Zhe, Shih-Che Hung, Ya-Ping Hsieh, and Ching-Fuh Lin. "Effective Energy Densities in KrF Excimer Laser Reformation as a Sidewall Smoothing Technique." Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 26, no. 1 (2008): 110. https://doi.org/10.1116/1.2825163.

MLA (9th ed.) Citation

Liang, Eih-Zhe, et al. "Effective Energy Densities in KrF Excimer Laser Reformation as a Sidewall Smoothing Technique." Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 26, no. 1, 2008, p. 110, https://doi.org/10.1116/1.2825163.