Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique.
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| Title: | Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique. |
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| Authors: | Eih-Zhe Liang1, Shih-Che Hung2, Ya-Ping Hsieh1, Ching-Fuh Lin3 |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jan/Feb2008, Vol. 26 Issue 1, p110-116, 7p, 2 Diagrams, 7 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 10711023 |
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| DOI: | 10.1116/1.2825163 |
