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Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique.

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Bibliographic Details
Title: Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique.
Authors: Eih-Zhe Liang1, Shih-Che Hung2, Ya-Ping Hsieh1, Ching-Fuh Lin3
Source: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jan/Feb2008, Vol. 26 Issue 1, p110-116, 7p, 2 Diagrams, 7 Graphs
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 29978508
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=29978508
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.2825163
    Languages:
      – Code: eng
        Text: English
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        PageCount: 7
        StartPage: 110
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      – TitleFull: Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique.
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            NameFull: Eih-Zhe Liang
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            NameFull: Shih-Che Hung
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            NameFull: Ya-Ping Hsieh
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            NameFull: Ching-Fuh Lin
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            – D: 01
              M: 01
              Text: Jan/Feb2008
              Type: published
              Y: 2008
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              Value: 26
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          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
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