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Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique.

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Bibliographic Details
Title: Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique.
Authors: Eih-Zhe Liang1, Shih-Che Hung2, Ya-Ping Hsieh1, Ching-Fuh Lin3
Source: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jan/Feb2008, Vol. 26 Issue 1, p110-116, 7p, 2 Diagrams, 7 Graphs
Database: Applied Science & Technology Source
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