Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering - Siffalovic, P.; Majkova, E.; Chitu, L.; Jergel, M.; Luby, S.; Keckes, J.; Maier, G.; Timmann, A.; Roth, S.V.; Tsuru, T.; Harada, T.; Yamamoto, M.; et al. (Vacuum, 2009)