Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching.
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| Title: | Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching. |
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| Authors: | Kallesøe, Christian1, christian.kallesoe@nanotech.dtu.dk, Mølhave, Kristian1, Larsen, Kasper F.1, Engstrøm, Daniel1, Hansen, Torben M.1, Bøggild, Peter1, Mårtensson, Thomas2, Borgström, Magnus2, Samuelson, Lars2 |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2010, Vol. 28 Issue 1, p21-26, 6p, 7 Diagrams, 1 Chart, 1 Graph |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 48539717 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=48539717 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1116/1.3268135 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 21 Titles: – TitleFull: Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Kallesøe, Christian – PersonEntity: Name: NameFull: Mølhave, Kristian – PersonEntity: Name: NameFull: Larsen, Kasper F. – PersonEntity: Name: NameFull: Engstrøm, Daniel – PersonEntity: Name: NameFull: Hansen, Torben M. – PersonEntity: Name: NameFull: Bøggild, Peter – PersonEntity: Name: NameFull: Mårtensson, Thomas – PersonEntity: Name: NameFull: Borgström, Magnus – PersonEntity: Name: NameFull: Samuelson, Lars IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Text: Jan2010 Type: published Y: 2010 Identifiers: – Type: issn-print Value: 21662746 Numbering: – Type: volume Value: 28 – Type: issue Value: 1 Titles: – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics Type: main |
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