Redistribution of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing.
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| Title: | Redistribution of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing. |
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| Authors: | Puga, M. M. S., Hummel, R. E., Burk, D. E. |
| Source: | Semiconductor Science & Technology; August 1992, Vol. 7, p1058-1066, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/7/8/006 |
