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Redistribution of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing.

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Bibliographic Details
Title: Redistribution of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing.
Authors: Puga, M. M. S., Hummel, R. E., Burk, D. E.
Source: Semiconductor Science & Technology; August 1992, Vol. 7, p1058-1066, 9p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500017329
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Redistribution of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing.
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  Data: <searchLink fieldCode="AU" term="%22Puga%2C+M%2E+M%2E+S%2E%22">Puga, M. M. S.</searchLink><br /><searchLink fieldCode="AU" term="%22Hummel%2C+R%2E+E%2E%22">Hummel, R. E.</searchLink><br /><searchLink fieldCode="AU" term="%22Burk%2C+D%2E+E%2E%22">Burk, D. E.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Semiconductor+Science+%26+Technology%22">Semiconductor Science & Technology</searchLink>; August 1992, Vol. 7, p1058-1066, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500017329
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1088/0268-1242/7/8/006
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 1058
    Titles:
      – TitleFull: Redistribution of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing.
        Type: main
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            NameFull: Puga, M. M. S.
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            NameFull: Hummel, R. E.
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            NameFull: Burk, D. E.
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            – D: 01
              M: 08
              Text: August 1992
              Type: published
              Y: 1992
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              Value: 02681242
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              Value: 7
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            – TitleFull: Semiconductor Science & Technology
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