APA (7th ed.) Citation

Pant, A. K., Murarka, S. P., & Shepard, C. (1992). Kinetics of platinum silicide formation during rapid thermal processing. Journal of Applied Physics, 72, 1833. https://doi.org/10.1063/1.351654

Chicago Style (17th ed.) Citation

Pant, A. K., S. P. Murarka, and C. Shepard. "Kinetics of Platinum Silicide Formation During Rapid Thermal Processing." Journal of Applied Physics 72 (1992): 1833. https://doi.org/10.1063/1.351654.

MLA (9th ed.) Citation

Pant, A. K., et al. "Kinetics of Platinum Silicide Formation During Rapid Thermal Processing." Journal of Applied Physics, vol. 72, 1992, p. 1833, https://doi.org/10.1063/1.351654.