Kinetics of platinum silicide formation during rapid thermal processing.
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| Title: | Kinetics of platinum silicide formation during rapid thermal processing. |
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| Authors: | Pant, A. K., Murarka, S. P., Shepard, C. |
| Source: | Journal of Applied Physics; September 1 1992, Vol. 72, p1833-1836, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.351654 |
