APA (7th ed.) Citation

Hall, G. W., Howson, R. P., & Chew, A. (1993). Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide. Vacuum, 44, 227. https://doi.org/10.1016/0042-207X(93)90159-8

Chicago Style (17th ed.) Citation

Hall, G. W., R. P. Howson, and A. Chew. "Reactive Unbalanced Magnetron Sputtering of Hydrogenated Amorphous Silicon and Silicon Oxide." Vacuum 44 (1993): 227. https://doi.org/10.1016/0042-207X(93)90159-8.

MLA (9th ed.) Citation

Hall, G. W., et al. "Reactive Unbalanced Magnetron Sputtering of Hydrogenated Amorphous Silicon and Silicon Oxide." Vacuum, vol. 44, 1993, p. 227, https://doi.org/10.1016/0042-207X(93)90159-8.