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Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.

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Bibliographic Details
Title: Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.
Authors: Hall, G. W., Howson, R. P., Chew, A.
Source: Vacuum; March-April 1993, Vol. 44, p227-230, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500095766
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Hall%2C+G%2E+W%2E%22">Hall, G. W.</searchLink><br /><searchLink fieldCode="AU" term="%22Howson%2C+R%2E+P%2E%22">Howson, R. P.</searchLink><br /><searchLink fieldCode="AU" term="%22Chew%2C+A%2E%22">Chew, A.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>; March-April 1993, Vol. 44, p227-230, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500095766
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/0042-207X(93)90159-8
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 227
    Titles:
      – TitleFull: Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Hall, G. W.
      – PersonEntity:
          Name:
            NameFull: Howson, R. P.
      – PersonEntity:
          Name:
            NameFull: Chew, A.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 03
              Text: March-April 1993
              Type: published
              Y: 1993
          Identifiers:
            – Type: issn-print
              Value: 0042207X
          Numbering:
            – Type: volume
              Value: 44
          Titles:
            – TitleFull: Vacuum
              Type: main
ResultId 1