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Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.

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Bibliographic Details
Title: Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.
Authors: Hall, G. W., Howson, R. P., Chew, A.
Source: Vacuum; March-April 1993, Vol. 44, p227-230, 4p
Database: Applied Science & Technology Source
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