APA (7th ed.) Citation

Swady, R. A., Ja'fer, H. A., & Howson, R. P. (1993). The reactive sputtering of thin films of TiN at low target voltages. Vacuum, 44, 297. https://doi.org/10.1016/0042-207X(93)90173-8

Chicago Style (17th ed.) Citation

Swady, R. A., H. A. Ja'fer, and R. P. Howson. "The Reactive Sputtering of Thin Films of TiN at Low Target Voltages." Vacuum 44 (1993): 297. https://doi.org/10.1016/0042-207X(93)90173-8.

MLA (9th ed.) Citation

Swady, R. A., et al. "The Reactive Sputtering of Thin Films of TiN at Low Target Voltages." Vacuum, vol. 44, 1993, p. 297, https://doi.org/10.1016/0042-207X(93)90173-8.

Warning: These citations may not always be 100% accurate.