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The reactive sputtering of thin films of TiN at low target voltages.

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Bibliographic Details
Title: The reactive sputtering of thin films of TiN at low target voltages.
Authors: Swady, R. A., Ja'fer, H. A., Howson, R. P.
Source: Vacuum; March-April 1993, Vol. 44, p297-301, 5p
Database: Applied Science & Technology Source
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