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A low-voltage, high-current, ion-bombardment source using magnetron principles.

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Bibliographic Details
Title: A low-voltage, high-current, ion-bombardment source using magnetron principles.
Authors: Ja'fer, H. A., Howson, R. P.
Source: Vacuum; March-April 1993, Vol. 44, p381-383, 3p
Database: Applied Science & Technology Source
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