APA (7th ed.) Citation

Ektessabi, A. M., Sato, S., & Kitamura, H. (1993). Simulation of ion beam assisted deposition—a comparison with experimental results. Vacuum, 44, 213. https://doi.org/10.1016/0042-207X(93)90156-5

Chicago Style (17th ed.) Citation

Ektessabi, A. M., S. Sato, and H. Kitamura. "Simulation of Ion Beam Assisted Deposition—a Comparison with Experimental Results." Vacuum 44 (1993): 213. https://doi.org/10.1016/0042-207X(93)90156-5.

MLA (9th ed.) Citation

Ektessabi, A. M., et al. "Simulation of Ion Beam Assisted Deposition—a Comparison with Experimental Results." Vacuum, vol. 44, 1993, p. 213, https://doi.org/10.1016/0042-207X(93)90156-5.