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Simulation of ion beam assisted deposition—a comparison with experimental results.

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Bibliographic Details
Title:	Simulation of ion beam assisted deposition—a comparison with experimental results.
Authors:	Ektessabi, A. M., Sato, S., Kitamura, H.
Source:	Vacuum; March-April 1993, Vol. 44, p213-217, 5p
Database:	Applied Science & Technology Source

Description
ISSN:	0042207X
DOI:	10.1016/0042-207X(93)90156-5