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Simulation of ion beam assisted deposition—a comparison with experimental results.

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Title: Simulation of ion beam assisted deposition—a comparison with experimental results.
Authors: Ektessabi, A. M., Sato, S., Kitamura, H.
Source: Vacuum; March-April 1993, Vol. 44, p213-217, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500095964
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Simulation of ion beam assisted deposition—a comparison with experimental results.
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        Value: 10.1016/0042-207X(93)90156-5
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      – Code: eng
        Text: English
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        PageCount: 5
        StartPage: 213
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      – TitleFull: Simulation of ion beam assisted deposition—a comparison with experimental results.
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            NameFull: Ektessabi, A. M.
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            NameFull: Sato, S.
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              Text: March-April 1993
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              Y: 1993
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