APA (7th ed.) Citation

Stefani, J., & Butler, S. W. (1994). On-line inference of plasma etch uniformity using in situ ellipsometry. Journal of the Electrochemical Society, 141, 1387. https://doi.org/10.1149/1.2054930

Chicago Style (17th ed.) Citation

Stefani, Jerry, and Stephanie Watts Butler. "On-line Inference of Plasma Etch Uniformity Using in Situ Ellipsometry." Journal of the Electrochemical Society 141 (1994): 1387. https://doi.org/10.1149/1.2054930.

MLA (9th ed.) Citation

Stefani, Jerry, and Stephanie Watts Butler. "On-line Inference of Plasma Etch Uniformity Using in Situ Ellipsometry." Journal of the Electrochemical Society, vol. 141, 1994, p. 1387, https://doi.org/10.1149/1.2054930.