APA (7th ed.) Citation

Perkowitz, S., Seiler, D. G., & Duncan, W. M. (1994). Optical characterization in microelectronics manufacturing. Journal of Research of the National Institute of Standards & Technology, 99, 605.

Chicago Style (17th ed.) Citation

Perkowitz, S., D. G. Seiler, and W. M. Duncan. "Optical Characterization in Microelectronics Manufacturing." Journal of Research of the National Institute of Standards & Technology 99 (1994): 605.

MLA (9th ed.) Citation

Perkowitz, S., et al. "Optical Characterization in Microelectronics Manufacturing." Journal of Research of the National Institute of Standards & Technology, vol. 99, 1994, p. 605.