View in EDS

Optical characterization in microelectronics manufacturing.

Saved in:
Bibliographic Details
Title: Optical characterization in microelectronics manufacturing.
Authors: Perkowitz, S., Seiler, D. G., Duncan, W. M.
Source: Journal of Research of the National Institute of Standards & Technology; September/October 1994, Vol. 99, p605-639, 35p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500181795
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Optical characterization in microelectronics manufacturing.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Perkowitz%2C+S%2E%22">Perkowitz, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Seiler%2C+D%2E+G%2E%22">Seiler, D. G.</searchLink><br /><searchLink fieldCode="AU" term="%22Duncan%2C+W%2E+M%2E%22">Duncan, W. M.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Research+of+the+National+Institute+of+Standards+%26+Technology%22">Journal of Research of the National Institute of Standards & Technology</searchLink>; September/October 1994, Vol. 99, p605-639, 35p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500181795
RecordInfo BibRecord:
  BibEntity:
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 35
        StartPage: 605
    Titles:
      – TitleFull: Optical characterization in microelectronics manufacturing.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Perkowitz, S.
      – PersonEntity:
          Name:
            NameFull: Seiler, D. G.
      – PersonEntity:
          Name:
            NameFull: Duncan, W. M.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 09
              Text: September/October 1994
              Type: published
              Y: 1994
          Identifiers:
            – Type: issn-print
              Value: 1044677X
          Numbering:
            – Type: volume
              Value: 99
          Titles:
            – TitleFull: Journal of Research of the National Institute of Standards & Technology
              Type: main
ResultId 1