Optical characterization in microelectronics manufacturing.
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| Title: | Optical characterization in microelectronics manufacturing. |
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| Authors: | Perkowitz, S., Seiler, D. G., Duncan, W. M. |
| Source: | Journal of Research of the National Institute of Standards & Technology; September/October 1994, Vol. 99, p605-639, 35p |
| Database: | Applied Science & Technology Source |
| ISSN: | 1044677X |
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